| 摘要 |
The objective of the present invention is to provide a method for manufacturing a thin film actuator which changes greatly in form and can be easily controlled in the amount or the direction of deformation, while being suppressed in performance deterioration due to use. The objective is achieved by a method for manufacturing a thin film actuator, wherein a laminated thin film (23), which is obtained by laminating a resin thin film (21) and a shape-memory alloy thin film (22), is heated and maintained, while having the shape thereof being restrained by being affixed to a member for molding, so that a predetermined creep deformation is confined only to the resin thin film. |
