发明名称 |
MICROMIRROR ARRANGEMENT HAVING A COATING AND METHOD FOR THE PRODUCTION THEREOF |
摘要 |
A micromirror arrangement (1)having: at least one micromirror (3) having a reflective surface (11) formed at a mirror substrate (2), and an antireflective coating (7) formed at the mirror substrate (2) outside the reflective surface (11). A reflective coating (8) is formed within the reflective surface (11) and has at least two layer subsystems, wherein the first layer subsystem has layers (8e, 8f) composed of a periodic sequence of alternate high and low refractive index layers composed of a nonmetallic material and is optimized with regard to the reflectivity in respect of a used wavelength of the micromirror arrangement, and wherein the second layer subsystem is optimized with regard to the reflectivity in respect of a measurement wavelength of the micromirror arrangement, said measurement wavelength deviating from the used wavelength. |
申请公布号 |
US2012182606(A1) |
申请公布日期 |
2012.07.19 |
申请号 |
US201213350719 |
申请日期 |
2012.01.13 |
申请人 |
WEISSENRIEDER KARL-STEFAN;LOERCHER ROLAND;PAZIDIS ALEXANDRA;CARL ZEISS SMT GMBH |
发明人 |
WEISSENRIEDER KARL-STEFAN;LOERCHER ROLAND;PAZIDIS ALEXANDRA |
分类号 |
G02B5/08;B05D3/06;B05D5/06;G02B1/11 |
主分类号 |
G02B5/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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