发明名称 TEMPERATURE ADJUSTING DEVICE, AND IMPRINTING DEVICE USING SAME
摘要 <p>Provided are: a temperature adjusting device capable of evenly heating and cooling, at high speed, an object such as a die or an object to be formed; and an imprinting device using said temperature adjusting device. A temperature adjusting device for adjusting the temperature of an object such as a die (100) or an object to be formed (200), said temperature adjusting device being provided with: a fluid supplying means (1) for supplying a fluid having a predetermined temperature from a plurality of supply outlets (11); a holding means (22) having a holding surface (22a) for holding the object, and a fluid receiving surface (22b) for receiving the fluid supplied from the supply outlets (11); a temperature adjusting case (3) for forming, together with the holding means (22), a temperature adjusting chamber (31) housing the supply outlets (11); and a discharge flow path (4) for discharging the fluid within the temperature adjusting chamber (31).</p>
申请公布号 WO2012096019(A1) 申请公布日期 2012.07.19
申请号 WO2011JP66500 申请日期 2011.07.20
申请人 SCIVAX CORPORATION;KAWAGUCHI HIROSUKE;TANAKA SATORU 发明人 KAWAGUCHI HIROSUKE;TANAKA SATORU
分类号 B29C33/02;B29C59/02;H01L21/027 主分类号 B29C33/02
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