| 摘要 |
<P>PROBLEM TO BE SOLVED: To irradiate approximately the same position with laser beams, at a temporal difference, while simply scanning a spot by a plurality of laser beams. <P>SOLUTION: A laser beam λa forms an image at an image-forming position P1a by a lens 120a, then is collimated by a lens 121a and enters a dual-wavelength mirror 123. A laser beam λb forms an image at an image-forming position P1b by a lens 120b, then is collimated by a lens 121b, reflected by a total reflection mirror 122, and enters the dual-wavelength mirror 123. The optical paths of the laser beam λa and the laser beam λb are joined together by the dual-wavelength mirror 123, and the laser beamλa and the laser beamλb form images at the image-forming positions P2a, P2b by a dual-wavelength lens 124. A module 131 for housing a total reflection mirror 119 and the lens 120b shifts in the direction orthogonal to the optical axis of the lens 120b by a shift mechanism 132. The present invention is applicable to, for example, a laser beam machining apparatus for machining a thin film solar cell panel. <P>COPYRIGHT: (C)2012,JPO&INPIT |
