| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of detecting a wide range of acceleration by one acceleration sensor element. <P>SOLUTION: An acceleration sensor comprises: a first mass body 21 which is held by a first beam 31 and can be displaced by acceleration; fixed electrodes 51, 52 arranged in a manner to be able to convert the displacement of the first mass body 21 into electric quantity; and displacement easiness changing members 22, 32, 8, 9 which cause a change in displacement easiness of the first mass body 21 when the displacement of the first mass body 21 exceeds a predetermined range. <P>COPYRIGHT: (C)2012,JPO&INPIT |
