| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a magnetic sensor equipped with a magnetism sensing part and a trimming part enabling adjustment of the magnetic sensitivity and resistance. <P>SOLUTION: The magnetic sensor includes a magnetism sensing part 21 having a cross-shaped pattern composed of a compound semiconductor provided on a substrate 26. Trimming parts 23a, 23b having the compound semiconductor are serially connected to at least one terminal 21a and one terminal 21d of input terminals 21a, 21b and output terminals 21c, 21d via a connection electrode 24. The adjustment of the magnetic sensitivity in constant voltage driving is made possible by laser-trimming the trimming part 23a of the input terminal side serially connected to the magnetism sensing part 21 via the connection terminal 24 while performing wafer probing, and the adjustment of output resistance is made possible by similarly trimming the trimming part 23b of the output terminal side. <P>COPYRIGHT: (C)2012,JPO&INPIT |
