| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent or reduce clacks of external electrodes by using a bimorph-type piezoelectric actuator using piezoelectric drive elements in which a plurality of stacked piezoelectric elements are overlapped. <P>SOLUTION: A bimorph-type piezoelectric actuator 10 is formed by bonding piezoelectric drive elements 12A and 12B, in which a plurality of stacked piezoelectric elements 20 are joined in the stacked direction via an adhesion 26, in a direction perpendicular to the stacked direction and by providing external electrodes 16 and 18 on a surface. When the maximum thickness of the external electrodes 16 and 18 is a, and the minimum thickness of the external electrodes 16 and 18 is b, the ratio of a/b is set to 1.2 to 1.5. Additionally, the external electrodes 16 and 18 are in a wave shape such that the thickness continuously changes, and have hardness of pencil hardness from F to B. <P>COPYRIGHT: (C)2012,JPO&INPIT |
