发明名称 PHOTOSENSITIVE RESIN COMPOSITION
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition allowing formation of a pattern excellent in mechanical characteristics. <P>SOLUTION: The photosensitive resin composition contains (A), (B1), (B2), (C) and (D) described in the following: (A) an alkali-soluble resin; (B1) a polymerizable compound including a cyclic ether structure with the carbon number 2-4 and an ethylenically unsaturated bond; (B2) a polymerizable compound different from (B1); (C) a polymerization initiator; and (D) a solvent. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012137745(A) 申请公布日期 2012.07.19
申请号 JP20110258537 申请日期 2011.11.28
申请人 SUMITOMO CHEMICAL CO LTD 发明人 INOUE KATSUJI
分类号 G03F7/027;C08F2/46;G03F7/033;H01L21/027 主分类号 G03F7/027
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