PIEZOELECTRIC ACTUATOR, LIQUID INJECTION HEAD, AND LIQUID INJECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric actuator that is capable of preventing the occurrence of cracks and has high reliability.

SOLUTION: A piezoelectric actuator 100 of the present invention comprises: a diaphragm 10; a first electrode 20 formed on the diaphragm 10; a piezoelectric body 30 formed above the diaphragm 10 and the first electrode 20; and a second electrode 40 formed above the piezoelectric body 30. The second electrode 40 crosses boundary lines 15 between the diaphragm 10 and the first electrode 20 along a first direction in a plan view and is formed so as to extend in a second direction. The first electrode 20 has a larger width in the first direction than the second electrode 40. The second electrode 40 has first portions 42 formed above the boundary lines 15 and a second portion 44 that is formed above the first electrode 20 and has a larger width in the first direction than the first portions 42. In a plan view, a top surface 36 of the piezoelectric body 30 is formed adjacent to the first portions 42 in the first direction.

COPYRIGHT: (C)2012,JPO&INPIT