PLANT AND PROCESS FOR PREPARING MONOSILANE

摘要

A plant and a process prepare monosilane (SiH4) by catalytically disproportionating trichlorosilane (SiHCl3). The trichlorosilane is converted in a reaction column over a catalyst and then purified in a rectification column. Between a reactive/distillative reaction region in the reaction column and the rectification column are arranged one or more condensers in which monosilane-containing reaction product from the reaction column is partly condensed. However, these are exclusively condensers which are operated at a temperature above −40° C.