| 摘要 |
A thermal processing system for processing work pieces such as silicon wafers for photovoltaic cells. The system include a firing furnace comprised of upper and lower banks for microzones having infrared lamps in each microzone. The microzone are lined with or formed of a reflective insulative material. Some embodiments of the system of the invention can be used as or in a continuous infrared furnace of oven having a drying, burn-off and firing zone. |
