CONTINUOUS SUPPLY ASSEMBLY OF THERMAL EVAPORATION SOURCE FOR OLED DEVICE DEPOSITION

摘要

PURPOSE: An apparatus for continuously supplying an evaporation source for depositing an OLED device is provided to improve productivity without shutdown by storing a crucible filled with deposition materials in an additional vacuum chamber. CONSTITUTION: A vapor forming apparatus(7) is installed in a deposition chamber and includes a heating source. The heating source heats an evaporation source(1a,1b). A first deposition material storage chamber(3a) and a second deposition material storage chamber(3b) include a plurality of evaporation sources. A first evaporation material inlet(13a) and a second evaporation material inlet(13b) are installed between the deposition chamber and the vapor forming apparatus.