发明名称 Near-field optical probe manufacturing using organo-mineral material and sol-gel process
摘要 The present invention concerns a method for manufacturing near-field optical probes comprising at least one organo-mineral material with an organic part and a mineral part, comprising steps of irradiating at least partially the organo-mineral material with a radiation beam to polymerize the organic part in the irradiated areas, and polycondensing the mineral part by sol-gel process. The present invention concerns also near-field optical probes and AFM and SNOM systems using the probes.
申请公布号 EP2477038(A1) 申请公布日期 2012.07.18
申请号 EP20110305043 申请日期 2011.01.14
申请人 CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE;UNIVERSITE MONTPELLIER 2 SCIENCES ET TECHNIQUES 发明人 FALGAYRETTES, PASCAL;KRIBICH, RAPHAEL;NATIVEL, LAURENT;MOURCHED, BACHAR;GALL-BORRUT, PASCALE;BELIER, BENOIT
分类号 G01Q60/06;G01Q60/22;G01Q70/14 主分类号 G01Q60/06
代理机构 代理人
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