| 摘要 |
PURPOSE: A sealing device for a chamber, a substrate bonding device using the same, and a substrate processing device are provided to prevent particles from bellows which make a chamber airtight. CONSTITUTION: A support plate(122) is arranged on an external side of a chamber. The support plate is separated from the chamber. The support plate supports bellows. A guide(211) is coupled with the inner circumference of the bellows. The guide linearly guides the bellows. The bellows are extended or contracted in the longitudinal direction of a shaft. |
