APPARATUS AND METHOD FOR MANUFACTURING NANOSTRUCTURE USING HOT-WALLED PULSED LASER DEPOSITION WITH ROLLING TARGET

摘要

PURPOSE: A nanostructure synthesizer using a target-rotating type hot-walled pulse laser deposition and a method thereof are provided to obtain uniform nanostructures by revolving the target object and irradiating laser thereof. CONSTITUTION: A nanostructure synthesizer using a target-rotating type hot-walled pulse laser deposition comprises a chamber(10), supporting parts(20,30), heaters(40) and a laser generator(50). The chamber accepts a substrate(3) and a target material(2). The supporting parts are located in the inside of the chamber and supports and revolves the target material. The heater is located outside the chamber. The chamber is heated so that the inner temperature of the chamber becomes over 600 deg. Celsius. The laser generator irradiates laser on the target material and decomposes thereof so that the nanostructure is formed on the substrate from the decomposed target material.