DESIGN OF PIXEL FOR MORE HIGHER FILL FACTOR WHEREIN MICROBOLOMETER

摘要

PURPOSE: A pixel design for enhancing a fill factor of a microbolometer is provided to enhance the structural stability of a microbolometer because four pixels share a single anchor and to improve productivity because a size of a chip having the microbolometer is reduced. CONSTITUTION: A pixel design for enhancing a fill factor of a microbolometer comprises a bolometer array. The bolometer array is composed of an arrangement of bolometer pixels. The bolometer pixel comprises a lower layer, a collaboration(130), an upper layer, an insulating layer, and an anchor(160). The lower layer comprises a reflective metal layer(120) of the upper part of a substrate(110). The collaboration is arranged in the upper part of the lower layer. The upper layer comprises a bolometer layer(140) of the upper part of the collaboration and a penetration metal layer(150). The insulating layer insulates the lower layer and upper layer. The anchor supports the upper layer.