| 摘要 |
Performing scribing accurately with a high yield rate. A scribing apparatus (1), including a conveyance means (10) for conveying a web of strip-like continuous flexible substrate (B) on which a target scribing film (M) is formed by applying a tensile strength, a pressing means (20) for pressing the flexible substrate (B) by bringing a convex curved surface (21S) into contact with the flexible substrate (B) from a side on which the target subscribing film (M) is not formed, and a scribing means (30) for performing scribing on the target scribing film (M) in which a tensile strength Tn and a pressing force P applied to the flexible substrate per unit cross-sectional area during the scribing satisfy Formulae (1) to (3) below: 1.5 MPa≦̸Tn≦̸25 MPa  (1) 4 kPa≦̸P≦̸50 kPa  (2) 5 GPa2≦̸Tn×P≦̸800 GPa2  (3) |
