发明名称 FIELD EFFECT TRANSISTOR, SEMICONDUCTOR SUBSTRATE, METHOD FOR MANUFACTURING FIELD EFFECT TRANSISTOR, AND METHOD FOR PRODUCING SEMICONDUCTOR SUBSTRATE
摘要 <p>Provided is a field-effect transistor including a gate insulating layer, a first semiconductor crystal layer in contact with the gate insulating layer, and a second semiconductor crystal layer lattice-matching or pseudo lattice-matching the first semiconductor crystal layer. Here, the gate insulating layer, the first semiconductor crystal layer, and the second semiconductor crystal layer are arranged in the order of the gate insulating layer, the first semiconductor crystal layer, and the second semiconductor crystal layer, the first semiconductor crystal layer is made of Inx1Ga1-x1Asy1P1-y1 (0<x1≰1, 0≰y1≰1), the second semiconductor crystal layer is made of Inx2Ga1-x2Asy2P1-y2 (0≰x2≰1, 0≰y2≰1, y2≠y1), and the electron affinity Ea1 of the first semiconductor crystal layer is lower than the electron affinity Ea2 of the second semiconductor crystal layer.</p>
申请公布号 KR20120081072(A) 申请公布日期 2012.07.18
申请号 KR20127004562 申请日期 2010.09.06
申请人 SUMITOMO CHEMICAL CO., LTD.;NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY;THE UNIVERSITY OF TOKYO 发明人 HATA MASAHIKO;YAMADA HISASHI;FUKUHARA NOBORU;TAKAGI SHINICHI;TAKENAKA MITSURU;YOKOYAMA MASAFUMI;YASUDA TETSUJI;URABE YUJI;MIYATA NORIYUKI;ITATANI TARO;ISHII HIROYUKI
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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