| 发明名称 |
Method for the production of a ceramic substrate, and a ceramic substrate |
| 摘要 |
A method for the production of a ceramic substrate for a semiconductor component, includes the steps of producing paper containing at least cellulose fibers, as well as a filler to be carbonized and/or SiC, pyrolizing the produced paper, and siliconizing the pyrolyzed paper.
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| 申请公布号 |
US8222171(B2) |
申请公布日期 |
2012.07.17 |
| 申请号 |
US20070373332 |
申请日期 |
2007.07.13 |
| 申请人 |
EBERT MARCO;HENRICH MARTIN;LAUER ANDREAS;NAUDITT GOTTHARD;SCHEIBEL THORSTEN;WEISS ROLAND;SCHUNK KOHLENSTOFFTECHNIK GMBH |
发明人 |
EBERT MARCO;HENRICH MARTIN;LAUER ANDREAS;NAUDITT GOTTHARD;SCHEIBEL THORSTEN;WEISS ROLAND |
| 分类号 |
C04B35/52;B32B9/00;B32B9/04;B32B13/04;B32B19/00;C01B31/00;C01B31/30;C01B31/34;C01B31/36;C04B35/00;C04B35/03;C04B35/56;H01L29/12 |
主分类号 |
C04B35/52 |
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