发明名称 Collection optics
摘要 An imaging system including a back-plane reflector having a concave aspherical reflecting surface and an outer diameter that is no greater than a first distance, with an aperture formed in the back-plane reflector, the aperture for admitting light from a field of view to the imaging system, a fore-plane reflector having a concave aspherical reflecting surface and an outer diameter that is no greater than the first distance, with an aperture formed in the fore-plane reflector, the aperture for discharging the light from the imaging system to an image plane, and a central reflector having a convex aspherical reflecting surface for receiving light from the fore-plane reflector and discharging the light from the imaging system through the aperture in the fore-plane reflector.
申请公布号 US8223443(B2) 申请公布日期 2012.07.17
申请号 US20100873387 申请日期 2010.09.01
申请人 KADKLY AZMI;KLA-TENCOR CORPORATION 发明人 KADKLY AZMI
分类号 G02B17/00;G02B5/10 主分类号 G02B17/00
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