| 摘要 |
A method for fabricating a hole pattern includes forming a first hard mask layer over an etch target layer, forming a second hard mask pattern over the first hard mask layer, which are patterned to be a line type in a first direction and have a selective etch ratio to the first hard mask layer, forming a third hard mask layer over the first hard mask layer to bury a space between adjacent ones of the second hard mask pattern, forming a photoresist pattern over the third hard mask layer, which is patterned to be a line type in a second direction; etching the third hard mask layer using the photoresist pattern to form a third hard mask pattern, removing the photoresist pattern, and etching the first hard mask layer using the second and third hard mask patterns. |
