发明名称 Method for making self aligning pillar memory cell device
摘要 A method for making a memory cell assembly includes forming a memory cell access layer over a substrate to create an access device with a bottom electrode. A memory material layer is formed over the memory cell access layer in electrical contact with the bottom electrode. A first electrically conductive layer is formed over the memory material layer. A first mask, extending in a first direction, is formed over the first electrically conductive layer and then trimmed so that those portions of the first electrically conductive layer and the memory material layer not covered by the first mask are removed.
申请公布号 US8222071(B2) 申请公布日期 2012.07.17
申请号 US201113050084 申请日期 2011.03.17
申请人 LUNG HSIANG-LAN;MACRONIX INTERNATIONAL CO., LTD. 发明人 LUNG HSIANG-LAN
分类号 H01L21/00 主分类号 H01L21/00
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