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发明名称
Apparatus for treatment of plural substrates
摘要
申请公布号
KR101165615(B1)
申请公布日期
2012.07.17
申请号
KR20080125368
申请日期
2008.12.10
申请人
发明人
分类号
H01L21/205;H01L21/00
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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