发明名称 Vertical power MOSFET semiconductor apparatus having separate base regions and manufacturing method thereof
摘要 A semiconductor apparatus includes a doped semiconductor layer formed on a semiconductor substrate of a first conductivity type and first and second gate trenches formed in the semiconductor layer, the second gate trench being separated from the first gate trench in a first direction. The doped semiconductor layer includes a low concentration base region of a second conductivity typed formed between the first and second gate trenches, a first source region of the first conductivity type, a second source region of the first conductivity type, a first high concentration base region of the second conductivity type, and a second high concentration base region of the second conductivity type formed so that the first and second high concentration base regions are separated by the low concentration base region, and the second high concentration base region is not below both of the first and second source regions.
申请公布号 US8222690(B2) 申请公布日期 2012.07.17
申请号 US20100923859 申请日期 2010.10.12
申请人 OHTANI KINYA;KOBAYASHI KENYA;RENESAS ELECTRONICS CORPORATION 发明人 OHTANI KINYA;KOBAYASHI KENYA
分类号 H01L29/66 主分类号 H01L29/66
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