发明名称 INSPECTION METHOD AND APPARATUS OF SUBSTRATE
摘要 PURPOSE: A substrate test method and apparatus are provided to shorten inspection time by controlling a lot inspection in order to match with tact time of a sampling inspection or a process. CONSTITUTION: An indentation impression crack inspection table(200) inspects an indentation impression inspection and a crack inspection at the same time. The indentation impression inspection inspects the state of a conduction ball attached to a substrate. The crack inspection inspects cracks of a portion of the substrate in which a tap is attached. A tap align inspection table(300) is included in one housing(100). The tap align inspection table completely inspects tap align. An indentation impression inspection camera and a crack inspection camera are installed at the align inspection table.
申请公布号 KR20120079900(A) 申请公布日期 2012.07.16
申请号 KR20110001235 申请日期 2011.01.06
申请人 ANI. CO., LTD. 发明人 OH, BYUNG JUN;JEON, DONG CHUL;PARK, JAE SUNG;KIM, TAE YOUNG;PARK, CHANG GUN
分类号 H05K13/08;G01N21/88 主分类号 H05K13/08
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