发明名称 METHOD FOR MAKING SEMICONDUCTOR EPITAXIAL STRUCTURE
摘要 A method for making a semiconductor epitaxial structure is provided. The method includes growing a substrate having an epitaxial growth surface, placing a carbon nanotube layer on the epitaxial growth surface, epitaxially growing a doped semiconductor epitaxial layer on the epitaxial growth surface. The carbon nanotube layer can be suspended above the epitaxial growth surface.
申请公布号 US2012178243(A1) 申请公布日期 2012.07.12
申请号 US201113276265 申请日期 2011.10.18
申请人 WEI YANG;FAN SHOU-SHAN;HON HAI PRECISION INDUSTRY CO., LTD.;TSINGHUA UNIVERSITY 发明人 WEI YANG;FAN SHOU-SHAN
分类号 H01L21/20 主分类号 H01L21/20
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