发明名称 Dummy Metal Design for Packaging Structures
摘要 A method of forming an integrated circuit structure is provided. The method includes forming a metal pad at a major surface of a semiconductor chip, forming an under-bump metallurgy (UBM) over the metal pad such that the UBM and the metal pad are in contact, forming a dummy pattern at a same level as the metal pad, the dummy pattern formed of a same metallic material as the metal pad and electrically disconnected from the metal pad, and forming a metal bump over the UBM such that the metal bump is electrically connected to the UBM and no metal bump in the semiconductor chip is formed over the dummy pattern.
申请公布号 US2012178252(A1) 申请公布日期 2012.07.12
申请号 US201213427430 申请日期 2012.03.22
申请人 LIU TZUAN-HORNG;HOU SHANG-YUN;JENG SHIN-PUU;WU WEI-CHENG;WEI HSIU-PING;CHEN CHIH-HUA;KUO CHEN-CHENG;CHEN CHEN-SHIEN;TSENG MING HUNG;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 LIU TZUAN-HORNG;HOU SHANG-YUN;JENG SHIN-PUU;WU WEI-CHENG;WEI HSIU-PING;CHEN CHIH-HUA;KUO CHEN-CHENG;CHEN CHEN-SHIEN;TSENG MING HUNG
分类号 H01L21/768 主分类号 H01L21/768
代理机构 代理人
主权项
地址