| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a grid having a high-aspect-ratio X-ray absorption unit by stacking a plurality of thin grids with high accuracy. <P>SOLUTION: A small grid 22 comprises a plurality of thin grids 30 to 33 stacked in the direction of X-ray application. The thin grids are interconnected by a connection structure unit 40 comprising, e.g., a recess part 40a provided in a support layer 37 of the first thin grid 30, a first connecting pad 40b provided inside the recess part 40a, a second connecting pad 40c formed on the thin second grid 31, and a connection member 40d for connecting the first connecting pad 40b to the second connecting pad 40c. The connection member 40d is made from a metal having a lower melting point than the thin grids, and joins the first thin grid 30 and the second thin grid 31 to each other by a self-alignment effect due to surface tension when the connection member is melted, in such a manner that the first connecting pad 40b and the second connecting pad 40c directly face each other and that the first thin grid 30 and the second thin grid 31 abut on each other. <P>COPYRIGHT: (C)2012,JPO&INPIT |
