发明名称 METHOD AND DEVICE FOR COATING SUBSTRATES FROM THE VAPOR PHASE
摘要 In a method for coating substrates with materials to be vaporized in a vacuum coating system, the vaporization material is deposited on the substrate by double vaporization using an intermediate carrier. The intermediate carrier is continuously moved and.
申请公布号 US2012177824(A1) 申请公布日期 2012.07.12
申请号 US201013387402 申请日期 2010.09.06
申请人 GROSS HARALD;VON ARDENNE ANLAGENTECHNIK GMBH 发明人 GROSS HARALD
分类号 C23C16/448;C23C16/455 主分类号 C23C16/448
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