| 摘要 |
<P>PROBLEM TO BE SOLVED: To optimize objective optics of a Fizeau interferometer to test a surface. <P>SOLUTION: A Fizeau interferometer 10 incorporates an off-axis paraboloidal reflector 30 that forms virtual images of a reference surface and a test surface 18 and a camera lens system 46 that converts the virtual images into real images on a camera detector surface 48. The camera detector surface 48 is arranged together with the camera lens system 46 to accommodate tilting of the virtual images by the off-axis paraboloidal reflector 30. Also included are: an effective light source 26 located with respect to the off-axis paraboloidal reflector 30; and a Fizeau reference surface 16 oriented for receiving collimated light at normal incidence, reflecting a first portion of the light and transmitting a second portion of the light. <P>COPYRIGHT: (C)2012,JPO&INPIT |
