PEELING SYSTEM, PEELING METHOD, AND COMPUTER STORAGE MEDIUM

摘要

This peeling system has: a loading/unloading station that loads/unloads substrates to be processed, support substrates, or stacked substrates in which these are made to adhere; a peeling processing station that carries out prescribed processing on substrates to be processed, support substrates and stacked substrates; and a transport station provided between the loading/unloading station and the peeling processing station. The peeling processing station has a peeling apparatus that peels the stacked substrates, a first washing apparatus that washes peeled substrates to be processed, and a second washing apparatus that washes the peeled support substrates. The pressure inside the transport station is a positive pressure in relation to the pressure inside the peeling apparatus, the pressure inside the first washing apparatus, and the pressure inside the second washing apparatus. The pressure inside a transport apparatus is a positive pressure in relation to the pressure inside the peeling apparatus and the pressure inside the first washing apparatus.