发明名称 METHOD AND SYSTEM FOR COHERENCE REDUCTION
摘要 <p>An optical system having coherence reduction capabilities includes a light source for generating a first light pulse; an asymmetrical pulse stretcher arranged to receive the first light pulse and to generate multiple light pulses, during a pulse sequence generation period, wherein the asymmetrical pulse stretcher includes multiple optical components which define a loop and a condenser lens is located between the asymmetrical pulse stretcher and an object, for directing the multiple pulses toward an area on the object At least two optical components of the multiple optical components are positioned in an almost symmetrical manner in relation to each other and introduce a coherence-related difference between at least two pulses of the multiple pulses. The pulse sequence generation period does not exceed a response period of a detector.</p>
申请公布号 WO2012094011(A1) 申请公布日期 2012.07.12
申请号 WO2011US20424 申请日期 2011.01.06
申请人 APPLIED MATERIALS ISRAEL LTD.;MANGAN, SHMUEL;GOLBERG, BORIS;VANDER, ROMAN;SAGIV, AMIR, MOSHE;APPLIED MATERIALS, INC. 发明人 MANGAN, SHMUEL;GOLBERG, BORIS;VANDER, ROMAN;SAGIV, AMIR, MOSHE
分类号 G03F7/20 主分类号 G03F7/20
代理机构 代理人
主权项
地址