PLASMA DEVICE, METHOD FOR FORMING POLYMERIZED FILM AND MODIFYING ITS SURFACE, NOZZLE PLATE, INKJET HEAD, AND INKJET PRINTER

摘要

PROBLEM TO BE SOLVED: To provide a plasma device that can facilitate forming a polymerized film and modifying its surface suitable for each processed material, such as a nozzle plate by means of simplified potential control.

SOLUTION: The plasma device 30 includes: a chamber 31 that can adjust an internal pressure and a gas atmosphere; a high-frequency power supply 34 that supplies power; and discharge electrodes that are provided in the chamber 31, including a high-frequency electrode 33 connected to the high-frequency power supply 34 and a ground electrode 36 connected to the earth 38, for placing the nozzle plate 20 thereon. Furthermore, the plasma device 30 includes a potential control section 40 with a variable coil 40a and a variable capacitor 40b between the earth 38 and the ground electrode 36.

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