| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a silicon nozzle substrate or the like which is excellent in durability against a discharge liquid by preventing an edge part of a nozzle hole from being corroded by the discharge liquid, on which a water-repellent film itself is strongly and tightly attached from the beginning, and which allows uniform coating and control on a coating region precisely in coating a nozzle hole inner wall and forming the water-repellent film on a nozzle surface. <P>SOLUTION: The nozzle hole 11 for discharging the liquid droplet is provided. A discharge liquid-resisting protecting film 13 is continuously formed of oxide from a liquid droplet discharge side surface 1a of the nozzle hole 11 to the inner wall 11c of the nozzle hole 11. The water-repellent film 14 is formed on the discharge liquid-resisting protecting film 13. A protecting film 12 formed of oxide same as the above oxide is continuously formed from the inner wall 11c of the nozzle hole 11 to a bonded surface 1b. The discharge liquid-resisting protecting film 13 is continuously formed on the protecting film 12. <P>COPYRIGHT: (C)2012,JPO&INPIT |
