| 摘要 |
<P>PROBLEM TO BE SOLVED: To allow a separation distance between respective movable arms to extend more when measurement by a four-terminal pair method is performed with an X-Y type circuit board inspection device. <P>SOLUTION: Coaxial cables C1-C4 are used for electric wiring to a measurement part 20 of electric current probes P1, P2 and electric voltage probes P3, P4. A probe support part 32a of one movable arm 32 is caused to support a first electric current probe P1 and a first electric voltage probe P3, and a probe support part 31a of the other movable arm 31 is caused to support a second electric current probe P2 and a second electric voltage probe P4. For example, a cable support substrate 33 disposed over the probe support parts 31a, 32a is provided on the movable arm 32 side. One end sides of respective coaxial cables C are fixed to the cable support substrate 33 by connecting external conductors S thereof with predetermined conduction means, and internal conductors IL of the respective coaxial cables C are connected to corresponding probes P via deformable electrical relay means 50. <P>COPYRIGHT: (C)2012,JPO&INPIT |
