摘要 |
<P>PROBLEM TO BE SOLVED: To provide: a deposition material suitable for forming a thin film excellent in transparency and gas barrier property; a thin-film sheet having the thin film; and a laminated sheet. <P>SOLUTION: In the deposition material manufactured by mixing first oxide powder and second oxide powder, the first oxide powder is TiO<SB POS="POST">2</SB>powder, the first oxide purity of the first oxide powder is not lower than 98%, the second oxide powder is one kind of powder or two or more kinds of mixed powder which are selected from a group composed of ZnO, MgO and CaO, the second oxide purity of the second oxide powder is not lower than 98%, the deposition material is composed of a pellet containing a first oxide particle and a second oxide particle, a mol ratio between a first oxide and a second oxide in deposition is 5 to 85:95 to 15, and the basicity of the pellet is not lower than 0.1. <P>COPYRIGHT: (C)2012,JPO&INPIT |