| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a thin film solar cell which suppresses influences on detection of film omission portions due to external factors and enables quantitative evaluations of the film omission portions compared to conventional manufacturing methods. <P>SOLUTION: This invention relates to a manufacturing method of a thin film solar cell having a substrate in which a transparent conductive film is provided on a glass substrate. The manufacturing method includes a substrate inspection process in which each substrate is inspected, and the substrate inspection process includes a process in which a gas including metal particles is blown onto a surface of a transparent conductive film side of the substrate, and a process in which a surface potential is measured on the surface of the transparent conductive film side of the substrate. <P>COPYRIGHT: (C)2012,JPO&INPIT |
