| 发明名称 |
METHOD FOR MONITORING CONCENTRATION OF DISSOLVED NITROGEN |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dissolved nitrogen concentration monitoring method that enables real-time accurate monitoring of the dissolved nitrogen concentration of a cleaning liquid without complicated operations as well as cost reduction. <P>SOLUTION: A dissolved oxygen concentration D<SB POS="POST">O2</SB>during ultrasonic wave irradiation is measured by a dissolved oxygen concentration meter 43. An increase amount ΔD<SB POS="POST">O2</SB>of dissolved oxygen concentration is calculated by subtracting an initial dissolved oxygen concentration D<SB POS="POST">0</SB>from the measured dissolved oxygen concentration D<SB POS="POST">O2</SB>. Subsequently, an approximate expression adaptable to a predetermined overflow rate or a predetermined output of an ultrasonic wave is read out from a storage section 46 and the approximate expression read out from the storage section 46 is used to calculate a dissolved nitrogen concentration D<SB POS="POST">N2</SB>of mixed ultrapure water from the increase amount ΔD<SB POS="POST">O2</SB>of dissolved oxygen concentration. <P>COPYRIGHT: (C)2012,JPO&INPIT |
| 申请公布号 |
JP2012132708(A) |
申请公布日期 |
2012.07.12 |
| 申请号 |
JP20100283078 |
申请日期 |
2010.12.20 |
| 申请人 |
SILTRONIC AG |
发明人 |
SHINBARA TERUO;TANABE ETSUKO;UCHIBE MASASHI;MORI YOSHIHIRO |
| 分类号 |
G01N33/18;G01N31/00;H01L21/304 |
主分类号 |
G01N33/18 |
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