发明名称 INTERPULSE PHASE SHIFT MEASUREMENT DEVICE, OFFSET FREQUENCY CONTROLLER, INTERPULSE PHASE SHIFT MEASUREMENT METHOD, AND OFFSET FREQUENCY CONTROL METHOD
摘要 <P>PROBLEM TO BE SOLVED: To measure interpulse phase shift of an optical frequency comb light source with high efficiency. <P>SOLUTION: An interpulse phase shift measurement device includes: optical path setting means (12, 13, 14) for branching an optical pulse signal (S) to be oscillated by an optical frequency comb light source (11) into a pair of optical pulse signals (Sa, Sb) and after that, reintegrating the optical pulse signal (S); pulse shift means (14) for setting relation between an oscillation period of the optical frequency comb light source and difference in optical path length of the pair of optical pulse signals so that a pulse shift number N between the pair of optical pulse signals included in synthetic pulse signals (Sc, Se, Sf) becomes an integer equal to or larger than 1; phase shift means (17, 15) for setting a phase shift amount between the pair of optical pulse signals to M ways of phase shift amounts (M: an integer of 3 or larger); detection means (16-0, 16-1, 16-2) for detecting M ways of interference intensity shown by the pair of optical pulse signals under the M ways of phase shift amounts based on the synthetic optical pulse signals; and calculation means (18) for calculating interpulse phase shift of the optical pulse signal (S) based on relation among M ways of interference intensity and the M ways of phase shift amounts. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012132711(A) 申请公布日期 2012.07.12
申请号 JP20100283176 申请日期 2010.12.20
申请人 NIKON CORP 发明人 AKE IKUSO;ODATE AKIRA;UCHIKAWA KIYOSHI
分类号 G01J9/02 主分类号 G01J9/02
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