摘要 |
<P>PROBLEM TO BE SOLVED: To connect at least a part of piezoelectric elements to a plurality of driver ICs to make drive in the plurality of piezoelectric elements uniform. <P>SOLUTION: A piezoelectric actuator 31 has a plurality of active parts 41a in which a piezoelectric layer 41 is sandwiched between a plurality of individual electrodes 42 and a diaphragm 40. The plurality of active parts 41a are driven by a driver IC 46. At least a part of the active parts 41a in the plurality of active parts 41a is each connected to two driver ICs 46a and 46b. The remaining active parts 41a in the plurality of active parts 41a are connected only to only one driver IC 46 in the two driver ICs 46a and 46b. <P>COPYRIGHT: (C)2012,JPO&INPIT |