TRANSPARENT ELECTRODE FILM FOR SOLAR CELL, AND SOLAR CELL USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a transparent electrode film for a solar cell, which comprises an inexpensive transparent oxide electrode film having excellent moisture and heat resistance, excellent permeability not only in a visible light region but also in a near infrared region, and using no rare metal having a low resistance value, and a solar cell provided with the same.

SOLUTION: This transparent electrode film for the solar cell comprises the transparent oxide electrode film obtained by doping low valence metal oxide using zinc oxide as a dopant. The transparent oxide electrode film is deposited by a spattering method, an ion plating method, a pulse laser deposition method (PLD method), or an electron beam (EB) vapor deposition method, using a target or a tablet obtained by doping the low valence metal oxide using zinc oxide as a main component. The low valence metal oxide is doped so that the ratio of low valence metal to zinc is 0.02 to 0.1 by an atomic ratio, and the specific resistance of the oxide transparent conductive film is 2.0×10-3Ω cm or less.

COPYRIGHT: (C)2012,JPO&INPIT