| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an Al-based alloy sputtering target which improves the alkali corrosion resistance of an Al-Nd/La alloy generally used as a wiring material having a low electrical resistivity and excellent heat resistance. <P>SOLUTION: The Al-based alloy sputtering target includes an Al-based alloy containing Nd and/or La of 0.1-3 atom%, and the amount of Fe included in the Al-based alloy is controlled to be 1/76 or less of the total amount of Nd and/or La. <P>COPYRIGHT: (C)2012,JPO&INPIT |
