| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a slimming method of a thin film containing carbon capable of improving reproducibility per slimming processing by suppressing variations in a slimming amount (cutting amount) when a salient of a pattern of the thin film containing the carbon such as a resist is slimmed. <P>SOLUTION: A slimming method of a thin film containing carbon includes a carrying-in step of carrying a workpiece W on which a patterned thin film 104 containing the carbon is formed into a processing container 4 of an oxidation device 2 and a slimming step of reducing a width of a salient 104B of a pattern by removing a surface of the thin film 104 containing the carbon by oxidizing the surface with an oxidation gas while supplying moisture into the processing container. <P>COPYRIGHT: (C)2012,JPO&INPIT |
