| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reactive spattering device which can uniformly hold the pressure of a spattering space. <P>SOLUTION: The reactive spattering device comprises: a base plate holder 7 arranged in a chamber; a target holder 6 for holding a target 4; adhesion prevention plates 40a, 40b, 40c and 23 which form the spattering space between the target holder and the base plate holder, and prevent the adhesion of spatter particles to the inside wall of the chamber; reactive gas introduction piping 161 for introducing a reactive gas into the spattering space; and an inert gas introduction port 35 which introduces an inert gas to the outside of the spattering space. The reactive spattering device also comprises a blocking member which prevents the adhesion of the spatter particles from the target attached to the target holder to the introduction port of the reactive gas introduction piping when performing spattering. <P>COPYRIGHT: (C)2012,JPO&INPIT |
