| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent formation of a cavity between capacitive blocks when the capacitive blocks, each including a plurality of crown bottom electrodes constituting a compensation capacitive element, are connected in series by an upper electrode. <P>SOLUTION: Two neighboring capacitive blocks (first block and second block) respectively formed on different common pad electrodes (22c, 22d) are electrically connected in series by an upper electrode 36c. A distance D1 between two neighboring capacitive blocks connected in series by the upper electrode 36c is set at a distance between lower electrodes facing each other on the outermost peripheries of the respective capacitive blocks and not more than two times larger than a film thickness of the upper electrode film embedded between two blocks. <P>COPYRIGHT: (C)2012,JPO&INPIT |
