摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray analyzer and an X-ray analysis method appropriate for performing X-ray analysis. <P>SOLUTION: An X-ray analyzer includes a mask 18 formed with an aperture 36 for irradiation X-ray and a hole 38 for reference X-ray, a support part 19 for supporting a specimen 20, and a two-dimensional X-ray detector 22 for acquiring a hologram image obtained by irradiating the specimen with X-ray through the mask, and the mask and the support part are freely movable relative to each other. <P>COPYRIGHT: (C)2012,JPO&INPIT |