| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coolant device capable of automatically operating a cooling treatment process for a long time. <P>SOLUTION: A cooling device 101 for a sample in an ion beam etching process has a sample stage 102 on which a sample is disposed; a coolant container containing a coolant, and heat transfer elements 106a and 106b for connecting at least one sample stage 102 so as to transfer heat to the coolant. The cooling device 101 has a cooling finger-shaped member 105 connected to the heat transfer elements 106a and 105b so as to transfer heat. The cooling finger-shaped member 105 includes a conduit in which the coolant can pass and flow, and which can be connected to the coolant container. <P>COPYRIGHT: (C)2012,JPO&INPIT |
