发明名称 JIG PLATE AND METHOD FOR STACKING SEMICONDUCTOR DEVICE CHIP USING THE JIG PLATE
摘要 <P>PROBLEM TO BE SOLVED: To provide a jig plate which can easily stack a plurality of semiconductor device chips corresponding to each of semiconductor devices formed on a semiconductor device wafer. <P>SOLUTION: In the jig plate which is used when a semiconductor device chip having a second semiconductor device formed thereon is stacked on each of first semiconductor devices of a semiconductor device wafer having the first semiconductor devices formed in each of regions that are partitioned by a plurality of crossing predetermined division lines, the jig plate has a reference pattern corresponding to the predetermined division lines of the semiconductor device wafer formed thereon. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012134233(A) 申请公布日期 2012.07.12
申请号 JP20100283283 申请日期 2010.12.20
申请人 DISCO ABRASIVE SYST LTD 发明人 KODAMA SHOICHI;KIM YONG SUK;MAEDA NOBUHIDE;KAWAI AKIHITO
分类号 H01L21/673;H01L21/50;H01L25/065;H01L25/07;H01L25/18 主分类号 H01L21/673
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