RF-BASED PYROLYTIC CLEANING

摘要

The disclosure provides an apparatus that includes a casing having a wall and defining a cavity. The apparatus may also include a first RF feed that feeds RF energy to the cavity at a first frequency range. The apparatus may also include a controller, configured to control RF energy fed into the cavity via the first RF feed. In some embodiments, the wall comprises a frequency selective surface (FSS) that selectively absorbs RF energy at the first frequency range. The controller may control feeding RF energy to the cavity via the first RF to heat at least a portion of the wall to a temperature above a specified lower temperature threshold for a specified period of time.