| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cleaning apparatus hardly falling and hardly leaving an unpolished part. <P>SOLUTION: The cleaning apparatus EQ includes a frame FR, and three brushes B1, B2, B3 connected in a rotatable and inclinable manner to the frame FR. The respective rotation axes η1, η2, η3 of the three brushes B1, B2, B3 are perpendicular to the respective inclination axes ξ1, ξ2, ξ3 of the three brushes B1, B2, B3. In a plan view, at least two of the inclination axes ξ1, ξ2, ξ3 intersect, and the positions of the three brushes B1, B2, B3 form a triangle. <P>COPYRIGHT: (C)2012,JPO&INPIT |
